Subject Code: ME6L062 Subject Name: MEMS & Microsystems Technology L-T-P: 3-0-0 Credit:  3
Pre-Requisite(s): None
Introduction to MEMS & MST. Scaling Laws and demand in miniaturization. Working principles of Micro Sensors, Actuators and applications in real systems.   Microsystems mechanisms & precision using flexures, design considerations, modeling and innovations. Materials selection, Micro Fabrication. Microfluidics, Chemical Sensors, Biomedical & Bio-MEMS, and Lab-on-a-chip. System Integration and Packaging.
  Text/Reference Books:
  1. Hsu T.R., MEMS & MICROSYSTEMS Design and Manufacture, Tata McGraw Hill Education Pvt. Ltd.
  2. Madou M., Fundamentals of Microfabrication: The Science of Miniaturization, Vol. I, II, & III, CRC Press.
  3. Senturia S.D., Microsystems Design, Springer.